シリコン基板の製造方法,申请号JP20120004277-传众专利搜索

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发明名称	シリコン基板の製造方法
摘要
申请公布号	JP5817542(B2)	申请公布日期	2015.11.18
申请号	JP20120004277	申请日期	2012.01.12
申请人		发明人
分类号	C30B29/06;C30B15/00;C30B33/02;H01L21/324	主分类号	C30B29/06
代理机构		代理人
主权项
地址

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