| 发明名称 | MEMS device and method of manufacturing the same | ||
| 摘要 | According to one embodiment, a MEMS device comprises a first electrode provided on a support substrate, a second electrode opposed to the first electrode and movable in the direction it is opposed to the first electrode, and beam parts, each connected to those sides of the second electrode, which oppose to each other, and each supporting the second electrode. The second electrode has a slit extending parallel to the sides to which the beam parts are connected and opening at both the front and the back. Further, the second electrode has at least one bridge part extending over the slit, crossing the slit and made of a material different from that of the second electrode. | ||
| 申请公布号 | US9187311(B2) | 申请公布日期 | 2015.11.17 |
| 申请号 | US201313966175 | 申请日期 | 2013.08.13 |
| 申请人 | KABUSHIKI KAISHA TOSHIBA | 发明人 | Yamazaki Hiroaki;Kubo Haruka |
| 分类号 | H01H57/00;B81B3/00;H01G5/18;H01H59/00 | 主分类号 | H01H57/00 |
| 代理机构 | Holtz, Holtz, Goodman & Chick PC | 代理人 | Holtz, Holtz, Goodman & Chick PC |
| 主权项 | 1. A MEMS device comprising: a first electrode provided on a support substrate; a second electrode opposed to the first electrode and being movable in a direction in which the second electrode is opposed to the first electrode; and beam parts connected to respective opposite sides of the second electrode, each of the beam parts supporting the second electrode, wherein the second electrode comprises a slit extending parallel to the sides of the second electrode to which the beam parts are connected, the slit opening at both a front and a back of the second electrode, wherein the second electrode further comprises at least one bridge part extending over the slit, the at least one bridge part crossing the slit, and wherein the at least one bridge part is made of a material different from a material of the second electrode, and both ends of the at least one bridge part are fixed on the second electrode. | ||
| 地址 | Tokyo JP | ||