Method of depositing and electrically conductive titanium oxide coating

摘要

A method of depositing an electrically conductive titanium oxide coating on a glass substrate, preferably by atmospheric chemical vapor deposition in a float glass manufacturing process, utilizes a precursor gas mixture including a halogenated, inorganic titanium compound, an organic oxygen containing compound, a reducing gas and one or more inert carrier gases.

主权项

1. A method of depositing an electrically conductive titanium oxide coating by atmospheric chemical vapor deposition on a glass substrate during a glass manufacturing process comprising:
providing a heated glass ribbon in a float bath; in a reactor, forming a uniform precursor gas mixture comprising a halogenated, inorganic titanium compound, an organic oxygen-containing compound, a reducing gas, and one or more inert carrier gases, wherein the reducing gas comprises no more than 10 mole % of the precursor gas mixture; and delivering the precursor gas mixture from the reactor at a temperature below the thermal decomposition temperature of the precursor gas mixture to a location adjacent the heated glass ribbon to be coated, the float bath atmosphere surrounding the heated glass ribbon being essentially at atmospheric pressure; wherein the temperature of the heated glass ribbon is sufficient to cause reaction of the precursor gas mixture so as to deposit a titanium oxide coating at a deposition rate greater than 10 Å/sec. on the glass ribbon to form a coated glass article exhibiting an electrical conductivity of greater than 1×10−2 S/cm.