发明名称 |
Mask assembly for thin film vapor deposition and manufacturing method thereof |
摘要 |
A mask assembly for a thin film deposition includes: a frame main body forming an opening; a plurality of unit masks having both ends fixed to the frame main body in a state that a tension force is applied in a first direction; and an end tension unit installed to the frame main body. The end tension unit moves according to a second direction crossing the first direction between two neighboring unit masks among a plurality of unit masks for tensioning of the unit mask in the second direction. |
申请公布号 |
US9187817(B2) |
申请公布日期 |
2015.11.17 |
申请号 |
US201314078008 |
申请日期 |
2013.11.12 |
申请人 |
Samsung Display Co., Ltd. |
发明人 |
Kim Yong-Hwan |
分类号 |
B05C11/00;C23C14/04;H01L51/00 |
主分类号 |
B05C11/00 |
代理机构 |
|
代理人 |
Bushnell, Esq. Robert E. |
主权项 |
1. A mask assembly, comprising:
a frame main body forming an opening; a plurality of unit masks having both ends fixed to two opposite edges of the frame main body in a state that a tension force is applied in a first direction; and an end tension unit installed exclusively at the two opposite edges of the frame main body to which the plurality of unit masks are fixed and moving according to a second direction crossing the first direction between two neighboring unit masks among the plurality of unit masks to cause a tension of each of the unit masks in the second direction, wherein one end tension unit is provided between the two neighboring unit masks. |
地址 |
Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do KR |