发明名称 Mask assembly for thin film vapor deposition and manufacturing method thereof
摘要 A mask assembly for a thin film deposition includes: a frame main body forming an opening; a plurality of unit masks having both ends fixed to the frame main body in a state that a tension force is applied in a first direction; and an end tension unit installed to the frame main body. The end tension unit moves according to a second direction crossing the first direction between two neighboring unit masks among a plurality of unit masks for tensioning of the unit mask in the second direction.
申请公布号 US9187817(B2) 申请公布日期 2015.11.17
申请号 US201314078008 申请日期 2013.11.12
申请人 Samsung Display Co., Ltd. 发明人 Kim Yong-Hwan
分类号 B05C11/00;C23C14/04;H01L51/00 主分类号 B05C11/00
代理机构 代理人 Bushnell, Esq. Robert E.
主权项 1. A mask assembly, comprising: a frame main body forming an opening; a plurality of unit masks having both ends fixed to two opposite edges of the frame main body in a state that a tension force is applied in a first direction; and an end tension unit installed exclusively at the two opposite edges of the frame main body to which the plurality of unit masks are fixed and moving according to a second direction crossing the first direction between two neighboring unit masks among the plurality of unit masks to cause a tension of each of the unit masks in the second direction, wherein one end tension unit is provided between the two neighboring unit masks.
地址 Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do KR
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