| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluorescence X-ray analyzer that allows a simple configuration to surely prevent a leakage of an X-ray outside the analyzer from an aperture provided in a chamber in fluorescence X-ray analyzers detecting a second order X-ray generated by irradiating a sample with a primary X-ray in the chamber exhausted by a vacuum pump.SOLUTION: A fluorescence X-ray analyzer detecting a two-order X-ray 6 generated by irradiating a sample 3 with a primary X-ray 5 from an X-ray tube 4 by detection means 7 in a chamber 1 exhausted by a vacuum pump 2 includes a safety mechanism 9 that shuts off a power supply to the X-ray tube 4 from a high-voltage power source 8 when a pressure in the chamber 1 exceeds a prescribed reference value. |
