| 摘要 |
PROBLEM TO BE SOLVED: To efficiently clean a filter.SOLUTION: This liquid supply device includes a tank, a supply line, a feeding mechanism, a filter, a cleaning fluid supply mechanism, a discharge line, and a bypass line. The cleaning fluid supply mechanism allows a cleaning fluid for cleaning the filter member of the filter to flow from the downstream side of the filter to the upstream side thereof. The discharge line is provided on the downstream side of the feeding mechanism and the upstream side of the filter member. One end of the bypass line is connected to the downstream side of the feeding mechanism in the supply line and the upstream side of the discharge line, and the other end is connected to the downstream side of the filter member. The liquid supply device allows a treatment liquid in the tank to flow from the downstream side to the upstream side thereof. |
