| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus capable of improving a defect detection rate in a sample in which defects having various sizes are mixed together, and a coordinate correction method.SOLUTION: The charged particle beam apparatus capable of acquiring position images of defects on a sample using information on the defects on the sample acquired by an inspection device comprises a stage, a charged particle beam optical system, an image operation unit, an optical microscope and a controller. The controller classifies the defects into a plurality of groups using information on defect sizes included in the information on the defects and determines execution order of fine alignment toward the outer periphery from the center of the sample sequentially from a group having smaller defect size out of the plurality of groups. |
