用于检测半导体晶圆的Ｘ射线检测装置（一）;X-RAY INSPECTION APPARATUS FOR INSPECTING SEMICONDUCTOR WAFERS

摘要

一种x射线检测系统包含：x射线源；样本支撑件，其用于支撑将要检测的样本，其中该样本支撑件包含支撑表面，该支撑表面在第一水平面中延伸；x射线侦测器；样本定位总成，其用于相对于该x射线源定位该样本支撑件；侦测器定位总成，其用于相对于该x射线源定位该x射线侦测器，其中该侦测器定位总成包含用于在第二水平面内于至少两个非平行方向上移动该侦测器的水平侦测器定位机构，及侦测器倾斜机构，该侦测器倾斜机构经组配以允许该侦测器绕至少两个非平行轴自该第二水平面倾斜。此布置允许快速影像获取而不折衷影像品质。; a sample positioning assembly for positioning the sample support relative to the x-ray source, a detector positioning assembly for positioning the x-ray detector relative to the x-ray source, wherein the detector positioning assembly comprises a horizontal detector positioning mechanism for moving the detector in at least two non-parallel directions within a second horizontal plane, and a detector tilting mechanism configured to allow the detector to be tilted from the second horizontal plane about at least two non-parallel axes. This arrangement allows for rapid image acquisition without compromising image quality.