AEROSOL GENERATOR AND AEROSOL DEPOSITION SYSTEM

摘要

An aerosol generator comprises: an aerosol chamber for generating aerosols by injecting a carrier gas flowing in ceramic powder; a load sensor for measuring the mass of the aerosol chamber; and a control part for controlling the flow rate of the carrier gas flowing in the aerosol chamber based on a change in the mass of the aerosol chamber measured in the load sensor. Therefore, the aerosol generator is capable of generating and supplying the uniform amount of aerosols, thereby forming a deposition film with uniform thickness on a base material.