发明名称 |
DISTANCE METROLOGY DEVICE, DISTANCE METROLOGY METHOD AND DISTANCE METROLOGY PROGRAM |
摘要 |
PROBLEM TO BE SOLVED: To provide a distance metrology device, distance metrology method and distance metrology program that can alleviate a wrong measurement arising from a reflection upon a lens.SOLUTION: A distance metrology device comprises: an angle change unit that can change an irradiation angle for irradiating a lens with laser light; a light reception element that receives return light of the laser light passing through the lens and returned by a reflection upon an object of measurement via the lens; an acquisition unit that acquires an influence of a reflection of a surface on an incident side of the laser light in the lens in accordance with the irradiation angle; and a correction unit that uses the influence of the reflection acquired by the acquisition unit to correct a signal to be output by the light reception element. |
申请公布号 |
JP2015200566(A) |
申请公布日期 |
2015.11.12 |
申请号 |
JP20140079331 |
申请日期 |
2014.04.08 |
申请人 |
FUJITSU LTD |
发明人 |
IIDA KOICHI;TEZUKA KOICHI;MORIKAWA TAKESHI |
分类号 |
G01S7/481;G01S17/10 |
主分类号 |
G01S7/481 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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