| 发明名称 |
WAFER CARRIER |
| 摘要 |
A wafer carrier 1 includes a lower unit 2 on which a semiconductor wafer 100 is placed, and an upper unit 3 detachably attached to the lower unit 2, and forming a sealed chamber 4 for housing the semiconductor wafer 100 between the upper unit 3 and the lower unit 2. The upper unit 3 is provided with plural lock mechanisms 5 that fix the lower unit 2 to the upper unit 3 by abutting on a side surface of the lower unit 2. |
| 申请公布号 |
US2015325462(A1) |
申请公布日期 |
2015.11.12 |
| 申请号 |
US201514699235 |
申请日期 |
2015.04.29 |
| 申请人 |
TOYOTA JIDOSHA KABUSHIKI KAISHA |
发明人 |
ABE Nobuhira |
| 分类号 |
H01L21/673 |
主分类号 |
H01L21/673 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A wafer carrier comprising:
a lower unit on which a semiconductor wafer is placed; and an upper unit detachably attached to the lower unit, and forming a sealed chamber for housing the semiconductor wafer between the upper unit and the lower unit, wherein the upper unit is provided with plural lock mechanisms that fix the lower unit to the upper unit by abutting on a side surface of the lower unit. |
| 地址 |
Toyota-shi JP |
