| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystal vibration element capable of reducing crystal impedance by increasing an area of an excitation electrode in a groove and manufacturing method of the same.SOLUTION: By making a projection 57 composed of a photosensitive resist film 43 in an area 54 to be a groove part to be a shape that promotes etching at a part where etching rate of a crystal wafer 41 is small, since a difference in etching rates in the area 54 to be the groove part may be reduced, depths of the groove part may be made uniform. Therefore, since the groove part may be formed deep while preventing the groove part from partially penetrating caused by differences in etching rates, an area of an excitation electrode in the groove may be increased and crystal impedance may be reduced. |
