| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp with which high illuminance can be obtained by suppressing a temperature rise even if high power is supplied.SOLUTION: The excimer lamp includes a discharge container in a double tube structure formed from a dielectric body. The discharge container includes a tubular outer peripheral wall and a tubular inner peripheral wall that is disposed inside of the outer peripheral wall along a tube axis of the outer peripheral wall. In one end of the outer peripheral wall, a light take-out window is provided so as to close an opening in an airtight manner, and one end of the inner peripheral wall close to the light take-out window is closed in an airtight manner separately from the light take-out window. Other ends of the outer peripheral wall and the inner peripheral wall are bonded in an airtight manner. In at least a part of an outer peripheral surface of the outer peripheral wall, an outside electrode is provided and along an inner peripheral surface of the inner peripheral wall, an inside electrode is provided. The inside of the discharge container is filled with a discharge gas forming an excimer molecule. In the excimer lamp, the inside electrode is formed from a conductor tube and within the conductor tube, a cooling medium flow passage is provided. |
