| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS device capable of suppressing adhesion of a membrane portion to a substrate.SOLUTION: An MEMS device includes a membrane portion 31 being disposed so as to be spaced apart from a substrate 10 via a cavity portion 23 and having a both ends support structure. A sacrifice layer filled into the cavity portion 23 is subjected to wet etching in a process of manufacturing of the membrane portion 31 and adhesion of the membrane portion 31 due to surface tension to the substrate 10 in a step of drying can be prevented by being provided with a protrusion portion 21 having a tapered shape toward the membrane portion 31 on a surface facing the membrane portion 31 of the substrate 10 and being axisymmetric with a width direction center portion of the membrane portion 31 as a center. |
