| 发明名称 |
ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME |
| 摘要 |
A method for manufacturing an acoustic wave device includes: forming reforming regions in a substrate along a first direction and a second direction intersecting the first direction by irradiating the substrate with a laser beam under different conditions in the first direction and the second direction, the substrate including a piezoelectric substrate on which an IDT (InterDigital Transducer) is formed, and linear expansion coefficients of the piezoelectric substrate being different in the first direction and the second direction; and cutting the substrate in the first direction and the second direction at the reforming regions. |
| 申请公布号 |
US2015325775(A1) |
申请公布日期 |
2015.11.12 |
| 申请号 |
US201514681729 |
申请日期 |
2015.04.08 |
| 申请人 |
TAIYO YUDEN CO., LTD. |
发明人 |
SHIMIZU Yohei |
| 分类号 |
H01L41/047 |
主分类号 |
H01L41/047 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for manufacturing an acoustic wave device comprising:
forming reforming regions in a substrate along a first direction and a second direction intersecting the first direction by irradiating the substrate with a laser beam under different conditions in the first direction and the second direction, the substrate including a piezoelectric substrate on which an IDT (InterDigital Transducer) is formed, and linear expansion coefficients of the piezoelectric substrate being different in the first direction and the second direction; and cutting the substrate in the first direction and the second direction at the reforming regions. |
| 地址 |
Tokyo JP |
