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发明名称
固态影像拾取装置及其制造方法
摘要
申请公布号
TWI508271
申请公布日期
2015.11.11
申请号
TW099126361
申请日期
2010.08.06
申请人
新力股份有限公司
发明人
大地朋和;宫波勇树;荒川伸一
分类号
H01L27/146
主分类号
H01L27/146
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
一种具有光电二极体之固态影像拾取装置,其中该等光电二极体各自包含:一N-型区域,其形成于一半导体基板中;一第一碳化矽层,其形成于该N-型区域上方;及一P-型区域,其包括一形成于该第一碳化矽层上方且掺杂有硼之第一矽层,该半导体基板具有分别界定用于形成该等光电二极体之区域之元件隔离区域,且该等元件隔离区域各自包含:一第二碳化矽层,其形成于一形成于该半导体基板中之元件隔离沟渠之一内壁上;及一第二矽层,其介隔着该第二碳化矽层地填充该元件隔离沟渠之一内侧且掺杂有硼。
地址
日本
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