| 摘要 |
<p>An ultrasonic motor (78) for causing elliptical vibrations at a contacting point with a driven object (3) by utilizing bending vibrations and longitudinal vibrations includes a vibrator (11) formed by stacking a plurality of rectangular piezoelectric plates (31,32,35,38) in a thickness direction, a driving circuit (59) for applying a driving signal to a piezoelectric plate, and a detection circuit (60) for detecting an electromotive force generated when the piezoelectric plate deforms, wherein the vibration is configured in such a manner that there are a first piezoelectric plate and a second piezoelectric plate among the plurality of rectangular piezoelectric plates, the first piezoelectric plate and the second piezoelectric plate being piezoelectric plates in which a longitudinal vibration polarization portion that can excite the longitudinal vibrations and a bending vibration polarization portion that can excite the bending vibrations are polarized in a thickness direction, and the first piezoelectric plate (32) is connected to the driving circuit (59) and the detection circuit (60), and the second piezoelectric plate (35) is connected to the driving circuit (59) and is not connected to the detection circuit (60).</p> |
