Aerostatic bearing assembly with allocated electrostatic pretensioning unit, in particular for vacuum application

摘要

The arrangement has an aerostatic bearing element (2) that includes a bearing body containing a supporting zone region. Gas supply openings or porous regions are arranged inside the supporting zone region for supplying gas that stays under pressure for generating a gas blanket. The aerostatic bearing element is attached to an electrostatic pretensioning unit (20) with an electrode. The voltage is applied to the electrode such that an electrostatic force component is produced in the direction of a surface normal of the bearing body of the aerostatic bearing element.