发明名称 磁気記録媒体及びその保護膜の製造方法
摘要 <p>A method for producing a protective film for a magnetic recording medium comprises steps of (a) providing a magnetic layer formed on a substrate; and (b) forming a protective film on the magnetic layer by means of a plasma CVD method using mixed gas of specific lower saturated hydrocarbon gas and specific lower unsaturated hydrocarbon gas as source gas. Step (b) includes (b-1) of forming a first protective film on the magnetic layer and (b-2) of forming a second protective film on the first protective film. B-1 uses source gas with gas mixture ratio such that average number of hydrogen atoms per carbon atom in the source gas is greater than 2.5 but less than 3.0. B-2 uses source gas with gas mixture ratio such that the average number of hydrogen atoms per carbon atom in the source gas is greater than 2.0 but less than 2.5.</p>
申请公布号 JP5808511(B2) 申请公布日期 2015.11.10
申请号 JP20150505672 申请日期 2012.10.29
申请人 发明人
分类号 G11B5/84;G11B5/72 主分类号 G11B5/84
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