Electromagnetic wave measurement device, measurement method, and recording medium

摘要

According to the present invention, an electromagnetic wave measurement device includes an electromagnetic wave output device, an electromagnetic wave detector and a measurement unit. The electromagnetic wave output device outputs an electromagnetic wave having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test including at least two layers, and the electromagnetic wave detector detects reflected electromagnetic waves which are the electromagnetic waves reflected by the respective at least two layers. The measurement unit measures the device under test based on one or both of extreme values of electric fields of the respective reflected electromagnetic waves and a time difference between timings in which the electric fields of the respective reflected electromagnetic waves take the extreme values.

主权项

1. An electromagnetic wave measurement device comprising:
an electromagnetic wave output device that outputs an electromagnetic wave having a frequency equal to or more than 0.01 THz and equal to or less than 100 THz toward a device under test including at least two layers; an electromagnetic wave detector that detects reflected electromagnetic waves which are electromagnetic waves reflected by the respective at least two layers; and a measurer that measures the device under test based on at least two extreme values of electric fields of the respective reflected electromagnetic waves and a time difference between times at which the electric fields of the respective reflected electromagnetic waves take the at least two extreme values, the at least two extreme values including a first extreme value and a second extreme value, wherein the measurer measures the device under test based on a product of a first ratio and a second ratio, or an absolute value of the product, the first ratio being a ratio of the first extreme value to an extreme value of an electric field of the electromagnetic wave output toward the device under test, the second ratio being a ratio of the second extreme value to the extreme value of the electric field of the electromagnetic wave output toward the device under test.