Bulk acoustic wave resonator

摘要

Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a bulk acoustic wave resonance unit and an anti-resonant frequency modifying unit to modify an anti-resonant frequency generated from the bulk acoustic wave resonance unit.

主权项

1. A bulk acoustic wave resonator (BAWR), comprising:
a bulk acoustic wave resonance unit comprising a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; and an anti-resonant frequency modifying unit configured to modify an anti-resonant frequency generated by the bulk acoustic wave resonance unit, based on a ground plane formed at a distance apart from the bulk acoustic wave resonance unit, wherein a distance between the first electrode and the ground plane and/or a distance between the second electrode and the ground plane has a respective value that is less than or equal to a thickness of the piezoelectric layer.