Manufacturing structure and process for compliant mechanisms

摘要

The invention relates, in various aspects, to systems and methods for MEMS actuated displays that can be driven at high speeds and at low voltages for improved image quality and reduced power consumption.

主权项

1. A MEMS device comprising:
a substrate; and a first beam having a height to width aspect ratio of at least 4:1, wherein the first beam completely encloses the boundary of a space in a plane parallel to the plane of the substrate, and wherein at least a portion of the first beam forms at least a portion of an actuator, wherein the height of the beam is in a direction orthogonal to the plane of the substrate and the width of the beam is in a direction parallel to the plane of the substrate.