Electrical component and method of manufacturing the same

摘要

According to one embodiment, an electrical component comprises a substrate, a functional element formed on the substrate, a first layer which includes through holes, and forms a cavity that stores the functional element on the substrate, and a second layer which is formed on the first layer, and closes the through holes. The first layer includes a first film, a second film on the first film, and a third film on the second film. A Young's modulus of the second film is higher than a Young's modulus of the first film and the third film.

主权项

1. An electrical component comprising:
a substrate; a functional element formed on the substrate; a first layer which includes through holes and which forms a cavity that stores the functional element on the substrate; and a second layer which is formed on the first layer and which closes the through holes, wherein the first layer covers the functional element and includes a first film, a second film provided on the first film, and a third film provided on the second film, and a Young's modulus of the second film is higher than a Young's modulus of each of the first film and the third film, and wherein a thickness of the second film is larger than a thickness of each of the first film and the third film.