| 发明名称 | Electrostatic chuck | ||
| 摘要 | Each of electrostatic chucks 1A to 1F includes a susceptor 11A having an adsorption face 11a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2. The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising MgO—AlN solid solution wherein aluminum nitride is dissolved into magnesium oxide. | ||
| 申请公布号 | US9184081(B2) | 申请公布日期 | 2015.11.10 |
| 申请号 | US201313869285 | 申请日期 | 2013.04.24 |
| 申请人 | NGK Insulators, Ltd. | 发明人 | Aikawa Kenichiro;Watanabe Morimichi;Jindo Asumi;Katsuda Yuji;Sato Yosuke;Isoda Yoshinori |
| 分类号 | H01L21/683;H01T23/00;C04B35/581;C04B35/58;C04B35/626;C04B35/645;C23C14/34 | 主分类号 | H01L21/683 |
| 代理机构 | Burr & Brown, PLLC | 代理人 | Burr & Brown, PLLC |
| 主权项 | 1. An electrostatic chuck comprising a susceptor and an electrostatic chuck electrode embedded within said susceptor, said susceptor comprising an adsorption face of adsorbing a semiconductor: wherein said susceptor comprises a plate shaped main body and a surface corrosion resistant layer including said adsorption face; wherein said surface corrosion resistant layer comprises a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components; and wherein said ceramic material comprises, as a main phase, a crystal phase comprising MgO—AlN solid solution wherein aluminum nitride is dissolved into magnesium oxide. | ||
| 地址 | Nagoya-Shi JP | ||