发明名称 発光素子の製造方法
摘要 <p>A light emitting device and method for making the same is disclosed. The light-emitting device includes an active layer sandwiched between a p-type semiconductor layer and an n-type semiconductor layer. The active layer emits light when holes from the p-type semiconductor layer combine with electrons from the n-type semiconductor layer therein. The active layer includes a number of sub-layers and has a plurality of pits in which the side surfaces of a plurality of the sub-layers are in contact with the p-type semiconductor material such that holes from the p-type semiconductor material are injected into those sub-layers through the exposed side surfaces without passing through another sub-layer. The pits can be formed by utilizing dislocations in the n-type semiconductor layer and etching the active layer using an etching atmosphere in the same chamber used to deposit the semiconductor layers without removing the partially fabricated device.</p>
申请公布号 JP5807015(B2) 申请公布日期 2015.11.10
申请号 JP20120541078 申请日期 2010.10.01
申请人 发明人
分类号 H01L33/24;H01L21/205;H01L21/302;H01L21/306;H01L33/32 主分类号 H01L33/24
代理机构 代理人
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