Extreme ultraviolet radiation (EUV) pellicle formation apparatus

摘要

Spacers arranged on opposite sides of an article to be processed into an EUV pellicle support the article. Plates on opposite ends of the spacer-article combination include respective electrodes. The plates, article, and spacers can be held together with a vacuum retention system. A center hole of each spacer forms a chamber with surfaces engaged by the spacer. A fluid entry extending from an outer surface of each spacer to its center hole allows delivery of fluid to each chamber. Additional spacers can be used to support additional articles. Additional plates and electrodes can also be used.

主权项

1. An apparatus for processing an article into an extreme ultraviolet (EUV) pellicle for protection of a photomask, the apparatus comprising:
a first plate including a first electrode arranged for connection to a voltage source; a second plate including a second electrode arranged for connection to the voltage source; a first spacer having a center hole and opposed first and second engagement surfaces, the first engagement surface being arranged to engage the first plate and the second engagement surface being arranged to engage a first frame supporting the article, thereby forming a first chamber; a second spacer substantially identical to the first spacer, a first engagement surface of the second spacer being arranged to engage the first frame, and a second engagement surface of the second spacer being arranged to engage the second plate, thereby forming a second chamber; first and second substantially concentric, substantially coplanar seals spaced apart in respective first and second grooves in each of the first and second engagement surfaces of the first and second spacers and arranged to substantially prevent fluid leakage from each respective one of the first and second chambers; and a respective vacuum passage extending from an outer surface of each of the first and second spacers toward the respective center hole and in fluid communication with a region of each of the respective first and second engagement surfaces between the respective first and second seals so as to retain the first and second plates and the frame in engagement with the seals and the engagement surfaces of the spacers.