Substrate supporting edge ring with coating for improved soak performance

摘要

Embodiments of the present invention provide a substrate supporting edge ring for supporting a substrate. In one embodiment, a substrate support ring is provided. The substrate support ring comprises an annular body. The annular body comprises an outer band extending radially inward from an outer annular sidewall; and a substrate supporting region extending inward from an inner portion of the outer band, wherein the annular body comprises a first material that is exposed and at least a portion of the substrate supporting region is covered with a coating comprising a second material that is different than the first material.

主权项

1. A substrate support ring, comprising:
an annular body comprising a ceramic material that includes:
an outer band comprising a film extending radially inward from an outer sidewall of the annular body, the film comprising a first silicon layer, an oxide layer, and a second silicon layer disposed on the oxide layer; anda substrate supporting region extending inward from an inner portion of the outer band.