Silicon crystalline material and method for manufacturing the same

摘要

Provided is a silicon crystalline material, which is manufactured by a CZ method to be used as a material bar for manufacturing a silicon single crystal by an FZ method and has a grasping section for being loaded in a crystal growing furnace employing the FZ method without requiring mechanical processing. A method for manufacturing such silicon crystalline material is also provided. The silicon crystalline material is manufactured by the silicon crystal manufacturing method employing the CZ method and is provided with the grasping section, which is manufactured in a similar way as a shoulder portion, a straight body portion and a tail portion in a silicon crystal growing step employing the CZ method, and is loaded in a single crystal manufacturing apparatus employing the FZ method to grow single crystals. A seed-crystal used in the silicon crystal manufacture employing the CZ method is used as the grasping section. The grasping section is manufactured by temporarily changing crystal growing conditions to form a protruding section or a recessed section on the outer circumference surface of the straight body section or by forming a dent on the shoulder portion of the straight body portion, at the time of manufacturing the silicon crystal by the CZ method.

主权项

1. A method for manufacturing a silicon single crystal by using a silicon crystal material, the method comprising:
manufacturing the silicon crystal material by the Czochralski method, the silicon crystal material comprising a shoulder portion gradually growing in diameter, a cylindrical straight body portion, a tail portion gradually reducing in diameter, and a gripped portion, the gripped portion being a convex portion formed immediately above the tail portion and along a circumference of the cylindrical straight body portion; attaching a gripper to the gripped portion of the silicon crystal material which has been formed in the manufacturing by the Czochralski method; and placing the silicon crystal material to which the gripper is attached in a furnace such that the silicon single crystal is grown by the floating zone method.