OPTICAL WAVEGUIDE ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide element and a method for manufacturing the optical waveguide element which has a shape with no waviness in an EO (electro-optic) polymer waveguide formed by using an organic polymeric material on a lower ground electrode and in an upper active electrode formed thereon, which achieves high production yield and uniform quality on the same substrate.SOLUTION: An optical waveguide element 10 of the present invention includes a substrate 11, a first electrode 12 formed on the substrate 11, a height adjusting part 13 formed on the substrate 11 and adjacent to the first electrode 12, and an optical waveguide 17 formed on the first electrode 12 and the height adjusting part 13 and composed of a lower clad 14 and an upper clad 16 made of a polymer and a core 15 made of a polymer.