| 摘要 |
The present invention provides a bearing mechanism which does not impede rotational motion of a rotary shaft, and suppresses organic pollution in a vacuum container. The bearing mechanism is accommodated in the vacuum container, and comprises a bearing, a magnet, a yoke, and magnetic fluid. The bearing comprises an inner race and an outer race arranged to face the inner race via a rolling body. The magnet has a first magnetic pole and a second magnetic pole opposite to the first magnetic pole, and is extended between the first magnetic pole and the second magnetic pole in an axial direction of the bearing. The yoke forms a magnetic circuit with the bearing and the magnet. The yoke is extended between the second magnetic pole and an end surface of the inner race, comes in contact with the second magnetic pole, and is separated from the end surface of the inner race. The magnetic fluid is supported by the magnetic circuit. |
