| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition excellent in storage stability, LWR performance, CDU performance, EL performance and development defect inhibition property.SOLUTION: The radiation-sensitive resin composition comprises a first polymer having a structural unit including an acid-dissociable group, a radiation-sensitive acid generator, an acid diffusion inhibitor represented by formula (1), and a solvent. In formula (1), Rto Reach independently represent a hydrogen atom or a 1-20C monovalent organic group, or two or more among R, one of or a plurality of Rto R, and Rand R, are coupled to form a 3- to 20-membered cyclic structure together with a carbon atom to which these groups are bonded; X represents an oxygen atom or a sulfur atom; and n and m represent an integer of 0 to 5, where either n or m is 0. |
