| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for automatically setting the inspection parameter of an image inspection process, in which the inspection parameter is selected and quantified on the basis of the image content of an image to be inspected.SOLUTION: The method is provided with the steps of: digitizing a reference image and obtaining a target value; dividing the reference image into a homogeneous image area that includes almost no edges and a non-homogeneous image area that includes image spots given many structures and many edges; obtaining a low acceptable limit value for the homogeneous image area of the digitized reference image, and obtaining a higher acceptable limit value for the non-homogeneous image area; assigning the obtained acceptable limit value to the target value of each of acceptable limit values in accordance with the positions of the target values in the homogeneous image and non-homogeneous image areas; calculating inspection sensitivity from the target value and each of the acceptable limit values; setting the parameter of the image inspection system on the basis of the inspection sensitivity; and setting the configuration of image inspection by using the parameter. |
