UNIT FOR PREHEATING A PRINTED CIRCUIT BOARD AND APPARATUS FOR BONDING A DIE INCLUDING THE SAME

摘要

A substrate preheating unit includes a support plate, a preheating plate, and a plurality of support blocks. The support plate supports the substrate loaded on the upper side thereof. The preheating plate is combined with the lower side of the support plate and includes at least one heater for preheating the substrate inside. The support blocks support the lower side of the preheating plate against the different structures to prevent heat from the preheating plate from being directly conducted to the different structure which is heat-sensitive.