发明名称 DISPOSITIF DE SEPARATION DE DEUX SUBSTRATS
摘要 <p>This disclosure relates to a device for separating two substrates to be utilized in electronics, optics, optoelectronics and/or photovoltaics. The device separates the substrates at an interface, the device comprising: a holder; a member for retaining the structure, the member being mounted on the holder; a tool for separating the two substrates, also mounted on the holder; and means for moving the separating tool and/or means for moving the retaining member relative to the holder so as to bring them closer together or move them farther apart from each other, preferably over a limited range of travel. This device is noteworthy in that the separating tool comprises a leading edge that has, in cross-section, in succession from its tip or its front edge to its back, a tapered portion that is extended by a flared portion.</p>
申请公布号 FR2995441(B1) 申请公布日期 2015.11.06
申请号 FR20120058370 申请日期 2012.09.07
申请人 SOITEC 发明人 LANDRU DIDIER
分类号 H01L21/02;B32B43/00;H01L21/304;H01L21/67 主分类号 H01L21/02
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