发明名称 ETCHING SOLUTION, METHOD FOR ETCHING IN WHICH SAME IS USED, METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE PRODUCT, METAL CORROSION INHIBITOR, AND METAL CORROSION-INHIBITING COMPOSITION
摘要 A semiconductor processor etching solution, wherein the etching solution has a plurality of adsorbing groups and contains a compound P (P1) that has a weight-average molecular weight of 1,000 or greater, or the etching solution has a plurality of adsorbing groups and contains a compound P (P2) that has a steric repulsion part.
申请公布号 WO2015166976(A1) 申请公布日期 2015.11.05
申请号 WO2015JP62947 申请日期 2015.04.30
申请人 FUJIFILM CORPORATION 发明人 TAKAHASHI, SATOMI;ARAYAMA, KYOUHEI;MIZUTANI, ATSUSHI;MURAYAMA, SATORU
分类号 H01L21/308 主分类号 H01L21/308
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