| 摘要 |
PROBLEM TO BE SOLVED: To contribute to the improvement of a yielding percentage by reducing contact points in MEMS device where at least two MEMS devices and a circuit board are connected at a contact point.SOLUTION: Each of MEMS devices includes: a base plate; a movable part having a movable electrode; a drive electrode and a diagnosis electrode fastened to the surface of the base plate; a plurality of penetration electrodes penetrating from the surface to the reverse of the base plate; and a plurality of MEMS side contact points provided on the reverse of the base plate, and electrically connected to any of the drive electrode, the movable electrode and the diagnosis electrode through the penetration electrode. A circuit board includes: a plurality of circuit side contact points contacting the MEMS side contact points; a drive circuit electrically connected to the drive electrode and the movable electrode through the circuit side contact points, the MEMS side contact points, and the penetration electrodes; and a diagnosis circuit electrically connected to the diagnosis electrode and the movable electrode through the circuit side contact points, the MEMS side contact points, and the penetration electrodes, and detecting the contact of the diagnosis electrode and the movable electrode. The diagnosis electrodes at least of the two MEMS devices are electrically connected to each other, and connected to the same MEMS side contact point through the same penetration electrode. |
