METHOD OF MANUFACTURING CAPACITOR, METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY DEVICE INCLUDING THE CAPACITOR, AND ORGANIC LIGHT EMITTING DISPLAY DEVICE MANUFACTURED BY USING THE METHOD

摘要

A method of manufacturing an organic light emitting display device includes: providing a capacitor on a substrate; providing a protection layer on the capacitor; providing an organic light emitting diode on the protection layer; and providing an encapsulation layer which encapsulates the organic light emitting diode. The providing the capacitor includes: providing a bottom electrode including an oxide semiconductor, on the substrate; providing an insulation layer on the substrate and overlapping the bottom electrode; annealing the bottom electrode to increase a carrier density of the bottom electrode; and providing an intermediate electrode on the insulation layer and overlapping the bottom electrode.

主权项

1. An organic light emitting display device comprising:
a thin film transistor comprising an oxide semiconductor active layer, a gate electrode, a source electrode and a drain electrode; a capacitor comprising:
an bottom electrode comprising an oxide semiconductor, on a substrate;an intermediate electrode on the substrate and overlapping the bottom electrode; andan insulation layer between the bottom electrode and the intermediate electrode; and an organic light emitting diode comprising a pixel electrode, an organic emissive layer and an opposite electrode, wherein a carrier density of the bottom electrode, is higher than that of the oxide semiconductor active layer.