| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam expander system including a beam expander device for reducing comatic aberration at each of multiple wavelengths of light, in which the whole shape is not enlarged, space for installing or storing the devices is comparatively small, and introduction cost is not increased.SOLUTION: The beam expander system includes: a first front stage beam converter that makes a parallel beam incident, and emits a parallel beam having a diameter larger than a diameter of the incident beam, or a divergent beam, and of which comatic aberration is within an allowable value, for a first wavelength; a second front stage beam converter of which comatic aberration is within an allowable value, for light of a second wavelength different from the first wavelength, and which emits a parallel beam having a diameter larger than a diameter of the incident beam, or a divergent beam; and a rear stage beam converter that makes the beam emitted by the first front stage beam converter incident, and emits a parallel beam having a diameter larger than a diameter of the incident beam. |
