发明名称 GROOVE PROCESSING TOOL AND SCRIBE APPARATUS WITH THE GROOVE PROCESSING TOOL
摘要 PROBLEM TO BE SOLVED: To provide a groove processing tool capable of improving abrasion resistance by devising a shape of a tip of a blade end to extend the life thereof and capable of suppressing the occurrence of a phenomenon such as film peeling during processing and also provide a scribe apparatus with the groove processing tool.SOLUTION: A groove processing tool includes: a rod-like body 81; a tapered part 82 formed on a lower part of the body 81; and a tip region 84 formed at an end portion of the tapered part 82 or at a distal end portion of a columnar part 83 formed continuously to the tapered part 82. The tip region 84 is configured with a horizontal bottom surface 85 and a tip 87 formed at a corner part between the bottom surface 85 and an outer peripheral side surface 86 of the columnar part 83 or the tapered part 82. The outer peripheral side surface 86 is coated with a film formed of a hard material which is harder than a material constituting the tool, and the bottom surface 85 exposes the surface of the material constituting the tool.
申请公布号 JP2015195347(A) 申请公布日期 2015.11.05
申请号 JP20140265621 申请日期 2014.12.26
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO LTD 发明人 HIRONO YOSHIFUMI
分类号 H01L21/304;B28D5/04;H01L31/0463;H01L31/0749 主分类号 H01L21/304
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