PELLICLE FRAME AND PROCESS FOR MANUFACTURING SAME

摘要

Provided is a pellicle frame that can prevent generation of haze and reduces a surface glittering defect under irradiation with collected light, and a method of manufacturing the same. The pellicle frame is obtained by using an aluminum frame material having a structure satisfying predetermined conditions on the circle-equivalent diameters of a Mg2Si crystallized product, an AlCuMg crystallized product, an Al—Fe-based crystallized product (AlmFe or Al7Cu2Fe), and an Al2CuMg crystallized product and on the area ratios of those crystallized products each having a circle-equivalent diameter of 1 μm or more, and in addition, subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing as an electrolyte a predetermined organic acid salt. In addition, the method of manufacturing a pellicle frame includes: preparing an aluminum frame material having a structure as described above; and subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing a predetermined organic acid salt, to form an anodic oxide film.

主权项

1. A pellicle frame, comprising an aluminum frame material, which is formed of an Al—Zn—Mg-based aluminum alloy, and has an anodic oxide film on a surface thereof,
wherein: the aluminum frame material has a structure, in which a Mg2Si crystallized product has a circle-equivalent diameter of 7 μm or less, an area ratio of a Mg2Si crystallized product having a circle-equivalent diameter of 1 μm or more is less than 0.10%, an AlCuMg crystallized product, an Al—Fe-based crystallized product, and an Al2CuMg crystallized product each have a circle-equivalent diameter of 9 μm or less, and a total area ratio of an AlCuMg crystallized product, an Al—Fe-based crystallized product, and an Al2CuMg crystallized product each having a circle-equivalent diameter of 1 μm or more is less than 0.20%; and the anodic oxide film is obtained through anodic oxidation processing using an alkaline electrolytic solution containing as an electrolyte any one kind or two or more kinds selected from the group consisting of dicarboxylic acid salts and tricarboxylic acid salts.