| 发明名称 |
TREATMENT DEVICE AND EXHAUST SWITCHING DEVICE THEREFOR, AND EXHAUST SWITCHING UNIT AND SWITCHING VALVE BOX |
| 摘要 |
A treatment device (1) which treats a treatment subject inside a treatment chamber (2) with treatment fluids of a plurality of types. An exhaust switching unit (3) is provided to an exhaust pipe (4) connected to the inside of the treatment chamber (2). The exhaust switching unit (3) is formed of a distribution box (8), switching valve boxes (9), and an exhaust tube (12). And the switching valve boxes (9), which correspond in number to the treatment fluids, are connected to the distribution box (8) in a parallel state. |
| 申请公布号 |
US2015314338(A1) |
申请公布日期 |
2015.11.05 |
| 申请号 |
US201314650998 |
申请日期 |
2013.11.07 |
| 申请人 |
SCREEN HOLDINGS CO., LTD ;KITZ SCT CORPORATION |
发明人 |
MORIOKA Toshihito;HIGUCHI Hideaki;IWABUCHI Toshiaki;KOJIMA Tsutomu |
| 分类号 |
B08B3/04;H01L21/67 |
主分类号 |
B08B3/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A treatment device which treats a treatment subject inside a treatment chamber with treatment fluids of a plurality of types, wherein an exhaust switching unit is provided to an exhaust pipe connected to the inside of the treatment chamber, the exhaust switching unit is formed of a distribution box, switching valve boxes each including a switching valve therein, and an exhaust tube, and the switching valve boxes corresponding in number to the treatment fluids are connected to the distribution box in a parallel state. |
| 地址 |
Kyoto JP |
