| 发明名称 |
FLOW CHANNEL DEVICE, METHOD FOR MANUFACTURING FLOW CHANNEL DEVICE, AND METHOD FOR INSPECTING FLOW CHANNEL DEVICE |
| 摘要 |
A device and a method for reducing man-hours for the inspection of a bonding in a flow channel device including a hollow flow channel disposed therein by bonding a plurality of substrates together. A flow channel device includes a plurality of hollow flow channels established by bonding substrates together in an overlapping manner, with at least one of the substrates including a plurality of grooves on a surface of the substrate, wherein a depressed shape at which bonding quality can be determined is provided at a position different from positions of the flow channels on at least one of the surfaces of the bonded substrates. |
| 申请公布号 |
US2015314287(A1) |
申请公布日期 |
2015.11.05 |
| 申请号 |
US201514698715 |
申请日期 |
2015.04.28 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Igata Eishi |
| 分类号 |
B01L3/00;G01N19/04 |
主分类号 |
B01L3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A flow channel device, comprising: a plurality of hollow flow channels established by bonding substrates together in an overlapping manner, with at least one of the substrates including a plurality of grooves on a surface of the substrate, wherein
a depressed shape at which bonding quality can be determined is provided at a position different from positions of the flow channels on at least one of the surfaces of the bonded substrates. |
| 地址 |
Tokyo JP |
