| 发明名称 |
OPTICAL APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE |
| 摘要 |
The present invention provides an optical apparatus that deforms a reflecting surface of a mirror, comprising a base plate, a plurality of actuators that are disposed between the base plate and the mirror and are configured to apply a force to the mirror, a detection unit configured to detect vibration generated in the base plate, and a control unit configured to control each actuator based on a result of detection performed by the detection unit such that a deformation of the mirror caused as a result of the vibration generated in the base plate is within an acceptable range. |
| 申请公布号 |
US2015316852(A1) |
申请公布日期 |
2015.11.05 |
| 申请号 |
US201514699365 |
申请日期 |
2015.04.29 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Asada Katsumi |
| 分类号 |
G03F7/20;G02B27/00;G02B26/08 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An optical apparatus that deforms a reflecting surface of a mirror, the optical apparatus comprising:
a base plate; a plurality of actuators that are disposed between the base plate and the mirror and are configured to apply a force to the mirror; a detection unit configured to detect vibration generated in the base plate; and a control unit configured to control each actuator based on a result of detection performed by the detection unit such that a deformation of the mirror caused as a result of the vibration generated in the base plate is within an acceptable range. |
| 地址 |
Tokyo JP |
