| 摘要 |
PROBLEM TO BE SOLVED: To provide an exhaust port part that is capable of efficiently raising the temperature of an entire exhaust port of a vacuum pump on which the exhaust port part is disposed, and to provide the vacuum pump with the exhaust port part disposed thereon.SOLUTION: The exhaust port part according to an embodiment of the present invention includes a heat insulation part for making it difficult for heat obtained from a heater disposed on the exhaust port part to be transferred to a base side and for making the heat be efficiently transferred to the depth (vacuum pump side) of the exhaust port. In addition, the vacuum pump is provided with the exhaust port part having the heat insulation part. The heat insulation part of the exhaust port part is provided with a flange part formed on the outer periphery of the exhaust port part, and a heat insulation spacer disposed in close contact with the flange part. Alternatively, an exhaust port part flange part serves as a heat insulation part, the exhaust port part flange part having a composition in which the flange part formed on the outer periphery of the exhaust port part and the heat insulation spacer are integrally formed. This configuration allows the temperature of the entire exhaust port of the vacuum pump to be efficiently raised, thereby reducing an amount of product and deposition material. |
