发明名称 |
ULTRASONIC TRANSDUCER ELECTRODE ASSEMBLY |
摘要 |
A method of fabricating an ultrasound transducer includes providing a substrate having a first side and a second side opposite the first side. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element. |
申请公布号 |
EP2938264(A1) |
申请公布日期 |
2015.11.04 |
申请号 |
EP20130867475 |
申请日期 |
2013.12.23 |
申请人 |
VOLCANO CORPORATION |
发明人 |
RICE, CHERYL;XI, DONGJUAN CHRIS |
分类号 |
A61B8/12;B06B1/06;H01L41/047;H01L41/29;H04R17/00 |
主分类号 |
A61B8/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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