发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 Provided is a transistor having small parasitic capacitance, a transistor having high frequency properties, or a semiconductor device including the transistor. An oxide semiconductor film includes a first area in which a first conductive film and the oxide semiconductor film are in contact with each other; a second area in which a first insulating film and the oxide semiconductor film are in contact with each other; a third area in which a third insulating film and the oxide semiconductor film are in contact with each other; a fourth area in which a second insulating film and the oxide semiconductor film are in contact with each other; and a fifth area in which a second conductive film and the oxide semiconductor film are in contact with each other. The first insulating film is placed on the oxide semiconductor film and the first conductive film; the second insulating film is placed on the second conductive film and the oxide semiconductor film; the third insulating film is placed on the first insulating film, the second insulating film, and the oxide semiconductor film; and the third conductive film and the oxide semiconductor film include an area in which the third conductive film and the oxide semiconductor film are overlapped with each other by interposing the third insulating film therebetween.
申请公布号 KR20150123718(A) 申请公布日期 2015.11.04
申请号 KR20150055132 申请日期 2015.04.20
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 KOEZUKA JUNICHI;SHIMA YUKINORI;JINTYOU MASAMI;NAKAZAWA YASUTAKA;YAMAZAKI SHUNPEI
分类号 H01L29/786 主分类号 H01L29/786
代理机构 代理人
主权项
地址