发明名称 |
Resonating element, resonator, oscillator, electronic apparatus, and mobile object |
摘要 |
A resonating element has a quartz crystal substrate having a vibrating portion and a thin-walled portion that is thinner than the vibrating portion, and a pair of excitation electrodes respectively disposed on opposite surfaces of the vibrating portion. Moreover, in the excitation electrode, each of a pair of sides arranged in a Z′-axis direction is convexly curved toward the center so that the excitation electrode has a constricted portion in which a length in the Z′-axis direction increases gradually from a central portion toward both ends in an X-axis direction. |
申请公布号 |
US9178471(B2) |
申请公布日期 |
2015.11.03 |
申请号 |
US201313959986 |
申请日期 |
2013.08.06 |
申请人 |
Seiko Epson Corporation |
发明人 |
Naito Matsutaro;Sato Toshiaki;Nishide Jun;Suzuki Takumi |
分类号 |
H01L41/08;H03H9/19;H03B5/32;H03H9/02;H03H9/17;H03H3/04;H03H9/05;H03H9/10 |
主分类号 |
H01L41/08 |
代理机构 |
Harness, Dickey & Pierce, P.L.C. |
代理人 |
Harness, Dickey & Pierce, P.L.C. |
主权项 |
1. A resonating element comprising:
a quartz crystal substrate having a vibrating portion and a thin-walled portion integrated with the vibrating portion, the vibrating portion including a vibration region vibrating in a thickness-shear vibration direction, the thin-walled portion being thinner than the vibrating portion; and a pair of excitation electrodes respectively disposed on opposite surfaces of the vibrating portion, wherein when directions orthogonal to each other in a plan view of the quartz crystal substrate are a first direction and a second direction, at least one of the pair of excitation electrodes has a constricted portion where each of a pair of sides of the excitation electrode extending in the first direction includes a portion that is convexly curved toward a center line of the excitation electrode in the second direction. |
地址 |
JP |