Coating slit apparatus for coating a substrate and method for coating using the same

摘要

An exemplary embodiment of the present invention discloses a coating apparatus including a stage configured to receive a substrate and a coating slit part. The coating slit part includes a guide member, a first body, a second body, and a discharge nozzle. The coating slit part is configured to dispose a coating material on the substrate.

主权项

1. A coating apparatus, comprising:
a stage configured to receive a substrate; a coating slit part configured to apply coating materials to the substrate, the coating slit part comprising:
a first body;an opposing second body;a third body arranged between the first body and the second body, the first, second, and third bodies forming a discharge nozzle through which the coating materials are discharged; anda guide member that extends from an end portion of the third body and away from the discharge nozzle; and a providing part configured to provide the coating materials to the coating slit part, wherein:
the discharge nozzle comprises:a first discharge nozzle formed by the first body and the guide member extended from the end portion of the third body; anda second discharge nozzle formed by the second body and the guide member extended from the end portion of the third body so that the coating materials are separately discharged; the guide member is configured to extend toward the substrate so as to be closer to the substrate than the first and second bodies; and a width of a cross-section of the guide member is greater than a width of a cross-section of the third body.