| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detection device capable of detecting a defect existing on an inspection object having a sag, with high accuracy.SOLUTION: The defect detection device includes a workpiece holder 1 for holding an inspection object. The workpiece holder 1 includes an inspection table 11, a pedestal 12 provided on a stage 11a of the inspection table 11, and a pressing plate 13. The pedestal 12 is put into the rear of a sagging part 103 of the inspection object when the inspection object is placed in a prescribed position Pt on the stage 11a. The pressing plate 13 is a transparent pressing plate to press at least a part of the inspection object placed in the prescribed position Pt toward the inspection table 11. Further, the pressing plate 13 includes a first tabular part 131 which is close to and faces the stage 11a of the inspection table 11 when the pressing plate 13 is disposed in a pressing position, and the first tabular part 131 is provided with an opening 131a which allows the pedestal 12 to pass therethrough when the pressing plate 13 is disposed in the pressing position. |
