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发明名称
带有吸附层之基板之捆包方法及捆包体以及带有吸附层之基板之捆包装置
摘要
本发明提供一种于将在正面具备吸附层之复数个基板不介隔片材地收纳于捆包容器之情形时,亦可自捆包容器容易地逐片取出基板的带有吸附层之基板之捆包方法及捆包体、以及带有吸附层之基板之捆包装置。
申请公布号
TW201541501
申请公布日期
2015.11.01
申请号
TW103145565
申请日期
2014.12.25
申请人
旭硝子股份有限公司 ASAHI GLASS COMPANY, LIMITED
发明人
伊藤泰则 ITO, YASUNORI;立山优贵 TATEYAMA, YUKI
分类号
H01L21/02(2006.01);B65H41/00(2006.01)
主分类号
H01L21/02(2006.01)
代理机构
代理人
陈长文
主权项
地址
日本 JP
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